ELECTRICAL, OPTICAL AND STRUCTURAL PROPERTIES OF UNDOPED AND DOPED AMORPHOUS CARBON THIN FILMS BY BIAS ASSISTED PYROLYSIS-CVD

Amorphous carbon thin films were successfully deposited by the bias assisted thermal-CVD system on insulator glass substrates at various deposition temperatures in the range of 250-550 degree celsius. The deposited amorphous carbon thin films are characterized by using I-V measurement, UV-VIS-NIR sp...

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Bibliographic Details
Main Author: SHAZWANA MOHD SHAH (Author)
Format: Thesis Book
Language:English
Subjects:
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Summary:Amorphous carbon thin films were successfully deposited by the bias assisted thermal-CVD system on insulator glass substrates at various deposition temperatures in the range of 250-550 degree celsius. The deposited amorphous carbon thin films are characterized by using I-V measurement, UV-VIS-NIR spectrophotometer and Atomic Force Microscopy (AFM).
Item Description:UiTM X Digitization
Physical Description:xii, 75 pages illustrations (some color) 30 cm
Bibliography:Includes bibliographical references (page 71-75)