MEASUREMENT OF NANOSTRUCTURED POROUS SILICON POROSITY USING NANOINDENTOR
Porous silicon (PSi) is composed by a nanocrystalline Si skeleton immersed in a network of interconnected pores. Porosity will be increase when etching time and current density increased and hardness values decrease with increase of porosity and anodization time.
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| Format: | Thesis Book |
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Shah Alam, Selangor
University Teknology MARA. Faculty of Applied Sciences
2009
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| Online Access: | Click Here to View Status and Holdings. |
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Nanostructured materials