MEASUREMENT OF NANOSTRUCTURED POROUS SILICON POROSITY USING NANOINDENTOR
Porous silicon (PSi) is composed by a nanocrystalline Si skeleton immersed in a network of interconnected pores. Porosity will be increase when etching time and current density increased and hardness values decrease with increase of porosity and anodization time.
Saved in:
| Main Author: | |
|---|---|
| Format: | Thesis Book |
| Published: |
Shah Alam, Selangor
University Teknology MARA. Faculty of Applied Sciences
2009
|
| Subjects: | |
| Online Access: | Click Here to View Status and Holdings. |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Add Tag 
Nanostructured materials