MEASUREMENT OF NANOSTRUCTURED POROUS SILICON POROSITY USING NANOINDENTOR

MEASUREMENT OF NANOSTRUCTURED POROUS SILICON POROSITY USING NANOINDENTOR

Porous silicon (PSi) is composed by a nanocrystalline Si skeleton immersed in a network of interconnected pores. Porosity will be increase when etching time and current density increased and hardness values decrease with increase of porosity and anodization time.

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Bibliographic Details
Main Author: Noridah Nordin (Author)
Format: Thesis Book
Published: Shah Alam, Selangor University Teknology MARA. Faculty of Applied Sciences 2009
Subjects:
Nanostructured materials
Online Access:Click Here to View Status and Holdings.
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