MEASUREMENT OF NANOSTRUCTURED POROUS SILICON POROSITY USING NANOINDENTOR
Porous silicon (PSi) is composed by a nanocrystalline Si skeleton immersed in a network of interconnected pores. Porosity will be increase when etching time and current density increased and hardness values decrease with increase of porosity and anodization time.
Saved in:
Main Author: | |
---|---|
Format: | Thesis Book |
Published: |
Shah Alam, Selangor
University Teknology MARA. Faculty of Applied Sciences
2009
|
Subjects: | |
Online Access: | Click Here to View Status and Holdings. |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Summary: | Porous silicon (PSi) is composed by a nanocrystalline Si skeleton immersed in a network of interconnected pores. Porosity will be increase when etching time and current density increased and hardness values decrease with increase of porosity and anodization time. |
---|---|
Item Description: | UiTM X Digitization |
Physical Description: | xi, 36 pages illustrations 30 cm |
Bibliography: | Includes bibliographical references (pages 299-302) |