PREPARATION AND CHARACTERIZATION OF SILICON NANOSTRUCTURES BY RADIO FREQUENCY (RF) MAGNETRON SPUTTERING

PREPARATION AND CHARACTERIZATION OF SILICON NANOSTRUCTURES BY RADIO FREQUENCY (RF) MAGNETRON SPUTTERING

This project details the preparation and characterization of Silicon (Si) nanostructures with a wide variety of morphologies such as nanoparticles, nanowires, nanotubes by Radio Frequency (RF) magnetron sputtering method. By using this method, the type of nanostructures can be determined.

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Bibliographic Details
Main Author: Nur Izzati Zamri (Author)
Format: Thesis Book
Subjects:
Nanosilicon
Silicon
Nano structures
Online Access:Click Here to View Status and Holdings.
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264 # 0 |a Shah Alam, Selangor  |b Universiti teknologi MARA, Faculty of Applied Sciences  |c 2012 
300 # # |a ix, 40 pages:  |b illustrations (some color);  |c 30 cm 
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502 # # |a Student report(BSc.)-Universiti Teknologi MARA, Faculty of Applied Sciences, 2012 
504 # # |a Includes bibliographical references (page 37-38) 
520 # # |a This project details the preparation and characterization of Silicon (Si) nanostructures with a wide variety of morphologies such as nanoparticles, nanowires, nanotubes by Radio Frequency (RF) magnetron sputtering method. By using this method, the type of nanostructures can be determined. 
650 # 0 |a Nanosilicon 
650 # 0 |a Silicon 
650 # 0 |a Nano structures 
710 2 # |a Faculty Of Applied Sciences  |e issuing body 
710 2 # |a Fakulti Sains Gunaan  |e issuing body 
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