PREPARATION AND CHARACTERIZATION OF SILICON NANOSTRUCTURES BY RADIO FREQUENCY (RF) MAGNETRON SPUTTERING

PREPARATION AND CHARACTERIZATION OF SILICON NANOSTRUCTURES BY RADIO FREQUENCY (RF) MAGNETRON SPUTTERING

This project details the preparation and characterization of Silicon (Si) nanostructures with a wide variety of morphologies such as nanoparticles, nanowires, nanotubes by Radio Frequency (RF) magnetron sputtering method. By using this method, the type of nanostructures can be determined.

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Bibliographic Details
Main Author: Nur Izzati Zamri (Author)
Format: Thesis Book
Subjects:
Nanosilicon
Silicon
Nano structures
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