PREPARATION AND CHARACTERIZATION OF SILICON NANOSTRUCTURES BY RADIO FREQUENCY (RF) MAGNETRON SPUTTERING
This project details the preparation and characterization of Silicon (Si) nanostructures with a wide variety of morphologies such as nanoparticles, nanowires, nanotubes by Radio Frequency (RF) magnetron sputtering method. By using this method, the type of nanostructures can be determined.
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Format: | Thesis Book |
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Online Access: | Click Here to View Status and Holdings. |
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Summary: | This project details the preparation and characterization of Silicon (Si) nanostructures with a wide variety of morphologies such as nanoparticles, nanowires, nanotubes by Radio Frequency (RF) magnetron sputtering method. By using this method, the type of nanostructures can be determined. |
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Item Description: | UiTM X Digitization |
Physical Description: | ix, 40 pages: illustrations (some color); 30 cm |
Bibliography: | Includes bibliographical references (page 37-38) |