PREPARATION AND CHARACTERIZATION OF SILICON NANOSTRUCTURES BY RADIO FREQUENCY (RF) MAGNETRON SPUTTERING

This project details the preparation and characterization of Silicon (Si) nanostructures with a wide variety of morphologies such as nanoparticles, nanowires, nanotubes by Radio Frequency (RF) magnetron sputtering method. By using this method, the type of nanostructures can be determined.

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Bibliographic Details
Main Author: Nur Izzati Zamri (Author)
Format: Thesis Book
Subjects:
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Description
Summary:This project details the preparation and characterization of Silicon (Si) nanostructures with a wide variety of morphologies such as nanoparticles, nanowires, nanotubes by Radio Frequency (RF) magnetron sputtering method. By using this method, the type of nanostructures can be determined.
Item Description:UiTM X Digitization
Physical Description:ix, 40 pages: illustrations (some color); 30 cm
Bibliography:Includes bibliographical references (page 37-38)