Dry etching for microelectronics
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| Other Authors: | |
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| Format: | Book |
| Language: | English |
| Published: |
Amsterdam New York New York, N.Y.
North-Holland Physics Pub. Distributors for the USA and Canada, Elsevier Science Pub. Co.
1984
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| Series: | Materials processing--theory and practices
v. 4 |
| Subjects: | |
| Online Access: | Click Here to View Status and Holdings. |
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Add Tag | Item Description: | Includes index. |
|---|---|
| Physical Description: | xi, 299 p. ill. 24 cm |
| Bibliography: | Bibliography: p. 223-294. |
| ISBN: | 0444869050 |
Materials modification by energetic atoms and ions Symposium held April 28-30, 1992, San Francisco, California, USA