Dry etching for microelectronics

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Bibliographic Details
Other Authors:	Powell, Ronald A
Format:	Book
Language:	English
Published:	Amsterdam New York New York, N.Y. North-Holland Physics Pub. Distributors for the USA and Canada, Elsevier Science Pub. Co. 1984
Series:	Materials processing--theory and practices v. 4
Subjects:	Semiconductors > Etching Plasma etching
Online Access:	Click Here to View Status and Holdings.
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