Digital holography for MEMS and microsystem metrology

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Bibliographic Details
Other Authors:	Asundi, Anand
Format:	Unknown
Published:	Chichester, West Sussex, UK John Wiley 2011
Series:	Wiley microsystem and nanotechnology series
Subjects:	Microelectromechanical systems > Measurement Microelectronics > Measurement Holographic testing > Measurement Image processing > Digital techniques
Online Access:	Click Here to View Status and Holdings.
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MARC


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090	0	0	\|a TK7875 \|b .D54 2011
245	0	0	\|a Digital holography for MEMS and microsystem metrology \|c edited by Anand Asundi.
260	#	#	\|a Chichester, West Sussex, UK \|b John Wiley \|c 2011
300	#	#	\|a xxii, 205 p. \|b ill. \|c 25 cm
490	1	#	\|a Wiley microsystem and nanotechnology series
504	#	#	\|a Includes bibliographical references and index
650	#	0	\|a Microelectromechanical systems \|x Measurement
650	#	0	\|a Microelectronics \|x Measurement
650	#	0	\|a Holographic testing \|x Measurement
650	#	0	\|a Image processing \|x Digital techniques
700	1	#	\|a Asundi, Anand
830	#	1	\|a Wiley microsystem and nanotechnology series
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