Digital holography for MEMS and microsystem metrology

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Bibliographic Details
Other Authors:	Asundi, Anand
Format:	Book
Published:	Chichester, West Sussex, UK John Wiley 2011
Series:	Wiley microsystem and nanotechnology series
Subjects:	Microelectromechanical systems > Measurement Microelectronics > Measurement Holographic testing > Measurement Image processing > Digital techniques
Online Access:	Click Here to View Status and Holdings.
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