Digital holography for MEMS and microsystem metrology

Digital holography for MEMS and microsystem metrology

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Bibliographic Details
Other Authors: Asundi, Anand
Format: Book
Published: Chichester, West Sussex, UK John Wiley 2011
Series:Wiley microsystem and nanotechnology series
Subjects:
Microelectromechanical systems > Measurement
Microelectronics > Measurement
Holographic testing > Measurement
Image processing > Digital techniques
Online Access:Click Here to View Status and Holdings.
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Description
Physical Description:xxii, 205 p. ill. 25 cm
Bibliography:Includes bibliographical references and index
ISBN:9780470978696 (cloth)
0470978694 (cloth)

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