Nanoimprint lithography principles, processes and materials

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Bibliographic Details
Main Author:	Lan, Hongbo 1970-
Other Authors:	Ding, Yucheng 1961-, Liu, Hongzhong 1971-
Format:	Book
Published:	New York Nova Science Publishers, Inc. 2011
Subjects:	Nanoelectronics Microlithography Nanostructures
Online Access:	Click Here to View Status and Holdings.
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001	wils-451532
020	#	#	\|a 9781611225013
040	#	#	\|a DLC \|d ITMB
090	0	0	\|a TK7874.84 \|b .L36 2011
100	1	#	\|a Lan, Hongbo \|d 1970-
245	1	0	\|a Nanoimprint lithography \|b principles, processes and materials \|c Hongbo Lan, Yucheng Ding and Hongzhong Liu
260	#	#	\|a New York \|b Nova Science Publishers, Inc. \|c 2011
300	#	#	\|a viii, 73 p. \|b ill. (some col.) \|c 23 cm
504	#	#	\|a Includes bibliographical references (p. [61]-68) and index
650	#	0	\|a Nanoelectronics
650	#	0	\|a Microlithography
650	#	0	\|a Nanostructures
700	1	#	\|a Ding, Yucheng \|d 1961-
700	#	#	\|a Liu, Hongzhong \|d 1971-
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=451532
964	#	#	\|c BOK \|d AS
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