Nanoimprint lithography principles, processes and materials

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Bibliographic Details
Main Author:	Lan, Hongbo 1970-
Other Authors:	Ding, Yucheng 1961-, Liu, Hongzhong 1971-
Format:	Book
Published:	New York Nova Science Publishers, Inc. 2011
Subjects:	Nanoelectronics Microlithography Nanostructures
Online Access:	Click Here to View Status and Holdings.
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