Nanoimprint lithography principles, processes and materials

Nanoimprint lithography principles, processes and materials

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Bibliographic Details
Main Author: Lan, Hongbo 1970-
Other Authors: Ding, Yucheng 1961-, Liu, Hongzhong 1971-
Format: Book
Published: New York Nova Science Publishers, Inc. 2011
Subjects:
Nanoelectronics
Microlithography
Nanostructures
Online Access:Click Here to View Status and Holdings.
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Description
Physical Description:viii, 73 p. ill. (some col.) 23 cm
Bibliography:Includes bibliographical references (p. [61]-68) and index
ISBN:9781611225013

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