MEMS reliability

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Bibliographic Details
Main Author: Hartzell, Allyson L.
Other Authors: Da Silva, Mark G., Shea, Herbert R., Senturia, Stephen D. 1940-
Format: Book
Published: New York Springer 2011
Series:MEMS reference shelf
Subjects:
Online Access:Click Here to View Status and Holdings.
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Description
Physical Description:xiii, 291 p. ill. 24 cm
Bibliography:Includes bibliographical references and index
ISBN:1441960171
9781441960177