MEMS reliability

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Bibliographic Details
Main Author:	Hartzell, Allyson L.
Other Authors:	Da Silva, Mark G., Shea, Herbert R., Senturia, Stephen D. 1940-
Format:	Book
Published:	New York Springer 2011
Series:	MEMS reference shelf
Subjects:	Microelectromechanical systems > Reliability
Online Access:	Click Here to View Status and Holdings.
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