Nanoparticle engineering for chemical-mechanical planarization fabrication of next-generation nanodevices

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Bibliographic Details
Main Author:	Paik, Ungyu
Other Authors:	Park, Jea-Gun
Format:	Book
Published:	Boca Raton, FL CRC Press/Taylor & Francis Groups 2009
Subjects:	Nanoparticles Nanoelectronics Chemical mechanical planarization
Online Access:	Click Here to View Status and Holdings.
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001	wils-420870
020	#	#	\|a 9781420059113 (hardcover : alk. paper)
020	#	#	\|a 1420059114 (hardcover : alk. paper)
040	#	#	\|a DLC \|d ITMB
090	0	0	\|a TK7874.84 \|b .P35 2009
100	1	#	\|a Paik, Ungyu
245	1	0	\|a Nanoparticle engineering for chemical-mechanical planarization \|b fabrication of next-generation nanodevices \|c Ungyu Paik, Jea-Gun Park
260	#	#	\|a Boca Raton, FL \|b CRC Press/Taylor & Francis Groups \|c 2009
300	#	#	\|a xiii, 191 p., [14] p. of plates \|b ill. (some col.) \|c 25 cm
504	#	#	\|a Includes bibliographical references (p. 171-175) and index
650	#	0	\|a Nanoparticles
650	#	0	\|a Nanoelectronics
650	#	0	\|a Chemical mechanical planarization
700	1	#	\|a Park, Jea-Gun
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=420870
964	#	#	\|c BOK \|d EH