Nanoparticle engineering for chemical-mechanical planarization fabrication of next-generation nanodevices

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Bibliographic Details
Main Author:	Paik, Ungyu
Other Authors:	Park, Jea-Gun
Format:	Book
Published:	Boca Raton, FL CRC Press/Taylor & Francis Groups 2009
Subjects:	Nanoparticles Nanoelectronics Chemical mechanical planarization
Online Access:	Click Here to View Status and Holdings.
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