Nanoparticle engineering for chemical-mechanical planarization fabrication of next-generation nanodevices

Nanoparticle engineering for chemical-mechanical planarization fabrication of next-generation nanodevices

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Bibliographic Details
Main Author: Paik, Ungyu
Other Authors: Park, Jea-Gun
Format: Book
Published: Boca Raton, FL CRC Press/Taylor & Francis Groups 2009
Subjects:
Nanoparticles
Nanoelectronics
Chemical mechanical planarization
Online Access:Click Here to View Status and Holdings.
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Description
Physical Description:xiii, 191 p., [14] p. of plates ill. (some col.) 25 cm
Bibliography:Includes bibliographical references (p. 171-175) and index
ISBN:9781420059113 (hardcover : alk. paper)
1420059114 (hardcover : alk. paper)

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