Photonic MEMS devices design, fabrication and control

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Bibliographic Details
Main Author: Liu, Ai-Qun
Other Authors: Zhang, Xuming
Format: Book
Published: Boca Raton, Fla. CRC Press 2009
Series:Optical science and engineering (Boca Raton, Fla.) 136
Subjects:
Online Access:Click Here to View Status and Holdings.
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020 # # |a 9781420045680 
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040 # # |a BTCTA  |d ITMB 
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100 1 # |a Liu, Ai-Qun 
245 1 0 |a Photonic MEMS devices  |b design, fabrication and control  |c Ai-Qun Liu ; co-authors, Xuming Zhang ... [et al.] 
260 # # |a Boca Raton, Fla.  |b CRC Press  |c 2009 
300 # # |a 483 p.  |b ill.  |c 27 cm 
490 1 # |a Optical science and engineering series  |v v.136 
504 # # |a Includes bibliographical references and index 
650 # 0 |a Microelectromechanical systems 
650 # 0 |a Photonics 
700 1 # |a Zhang, Xuming 
830 # 1 |a Optical science and engineering (Boca Raton, Fla.)  |v 136 
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