Photonic MEMS devices design, fabrication and control
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Main Author: | |
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Other Authors: | |
Format: | Book |
Published: |
Boca Raton, Fla.
CRC Press
2009
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Series: | Optical science and engineering (Boca Raton, Fla.)
136 |
Subjects: | |
Online Access: | Click Here to View Status and Holdings. |
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LEADER | 00000n a2200000 a 4501 | ||
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001 | wils-419987 | ||
020 | # | # | |a 9781420045680 |
020 | # | # | |a 1420045687 |
040 | # | # | |a BTCTA |d ITMB |
090 | 0 | 0 | |a TK7875 |b .L58 2008 |
100 | 1 | # | |a Liu, Ai-Qun |
245 | 1 | 0 | |a Photonic MEMS devices |b design, fabrication and control |c Ai-Qun Liu ; co-authors, Xuming Zhang ... [et al.] |
260 | # | # | |a Boca Raton, Fla. |b CRC Press |c 2009 |
300 | # | # | |a 483 p. |b ill. |c 27 cm |
490 | 1 | # | |a Optical science and engineering series |v v.136 |
504 | # | # | |a Includes bibliographical references and index |
650 | # | 0 | |a Microelectromechanical systems |
650 | # | 0 | |a Photonics |
700 | 1 | # | |a Zhang, Xuming |
830 | # | 1 | |a Optical science and engineering (Boca Raton, Fla.) |v 136 |
856 | 4 | 0 | |z Click Here to View Status and Holdings. |u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=419987 |
964 | # | # | |c BOK |d EE |
998 | # | # | |a 00260##a002.8.2||00260##b002.8.4||00260##c002.7.6||00300##a003.4.1||00300##b003.6.1||00300##c003.5.1|| |