Photonic MEMS devices design, fabrication and control

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Bibliographic Details
Main Author:	Liu, Ai-Qun
Other Authors:	Zhang, Xuming
Format:	Book
Published:	Boca Raton, Fla. CRC Press 2009
Series:	Optical science and engineering (Boca Raton, Fla.) 136
Subjects:	Microelectromechanical systems Photonics
Online Access:	Click Here to View Status and Holdings.
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