Photonic MEMS devices design, fabrication and control

Photonic MEMS devices design, fabrication and control

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Bibliographic Details
Main Author: Liu, Ai-Qun
Other Authors: Zhang, Xuming
Format: Unknown
Published: Boca Raton, Fla. CRC Press 2009
Series:Optical science and engineering (Boca Raton, Fla.) 136
Subjects:
Microelectromechanical systems
Photonics
Online Access:Click Here to View Status and Holdings.
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Description
Physical Description:483 p. ill. 27 cm
Bibliography:Includes bibliographical references and index
ISBN:9781420045680
1420045687

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