Reliability of MEMS

Saved in:

Bibliographic Details
Other Authors:	Tsuchiya, Toshiyuki, Tabata, Osamu 1956-
Format:	Book
Published:	Weinheim Wiley-V 2008
Series:	Advanced micro & nanosystems v6
Subjects:	Microelectromechanical systems > Reliability
Online Access:	Click Here to View Status and Holdings.
Tags:	Add Tag No Tags, Be the first to tag this record!

MARC


LEADER	00000n a2200000 a 4501
001	wils-385833
020	#	#	\|a 9783527314942
020	#	#	\|a 3527314946
040	#	#	\|a SISPL \|d ITMB
090	0	0	\|a TK7875 \|b .R437 2008
245	0	0	\|a Reliability of MEMS \|c edited by Osamu Tabata and Toshiyuki Tsuchiya
260	#	#	\|a Weinheim \|b Wiley-V \|c 2008
300	#	#	\|a xx, 303 p \|b ill. \|c 25 cm
490	1	#	\|a Advanced micro & nanosystems \|v v6
500	#	#	\|a "Testing of materials and devices"--Cover
504	#	#	\|a Includes bibliographical references and index
650	#	0	\|a Microelectromechanical systems \|x Reliability
700	1	#	\|a Tsuchiya, Toshiyuki.
700	#	#	\|a Tabata, Osamu \|d 1956-
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=385833
964	#	#	\|c BOK \|d 01
998	#	#	\|a 00260##a0017.8\|\|00260##b0017.8\|\|00260##c0017.8\|\|00300##a0017.8\|\|00300##b0017.8\|\|00300##c0017.8\|\|00500##a0017.8\|\|01700##a0017.8\|\|01700##d0017.8\|\|