Reliability of MEMS

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Bibliographic Details
Other Authors:	Tsuchiya, Toshiyuki, Tabata, Osamu 1956-
Format:	Book
Published:	Weinheim Wiley-V 2008
Series:	Advanced micro & nanosystems v6
Subjects:	Microelectromechanical systems > Reliability
Online Access:	Click Here to View Status and Holdings.
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