Reliability of MEMS
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| Other Authors: | , |
|---|---|
| Format: | Book |
| Published: |
Weinheim
Wiley-V
2008
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| Series: | Advanced micro & nanosystems
v6 |
| Subjects: | |
| Online Access: | Click Here to View Status and Holdings. |
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Add Tag | Item Description: | "Testing of materials and devices"--Cover |
|---|---|
| Physical Description: | xx, 303 p ill. 25 cm |
| Bibliography: | Includes bibliographical references and index |
| ISBN: | 9783527314942 3527314946 |
MEMS reliability