Dielectric films for advanced microelectronics
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Other Authors: | Baklanov, Mikhail, Green, Martin, Maex, Karen |
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Format: | Book |
Published: |
Chichester, England; Hoboken, NJ
John Wiley & Sons
2007
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Series: | Wiley series in materials for electronic and optoelectronic applications
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Subjects: | |
Online Access: | Click Here to View Status and Holdings. |
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