Dielectric films for advanced microelectronics

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Bibliographic Details
Other Authors:	Baklanov, Mikhail, Green, Martin, Maex, Karen
Format:	Unknown
Published:	Chichester, England; Hoboken, NJ John Wiley & Sons 2007
Series:	Wiley series in materials for electronic and optoelectronic applications
Subjects:	Dielectric films > Materials Microelectronics > Materials
Online Access:	Click Here to View Status and Holdings.
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