Dielectric films for advanced microelectronics

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Bibliographic Details
Other Authors:	Baklanov, Mikhail, Green, Martin, Maex, Karen
Format:	Book
Published:	Chichester, England; Hoboken, NJ John Wiley & Sons 2007
Series:	Wiley series in materials for electronic and optoelectronic applications
Subjects:	Dielectric films > Materials Microelectronics > Materials
Online Access:	Click Here to View Status and Holdings.
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MARC


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001	wils-366854
020	0	0	\|a 9780470013601 (hbk.)
020	0	0	\|a 0470013605 (hbk.)
040	#	#	\|a DLC \|d ITMB
090	0	0	\|a TK7871.15.F5 \|b D54 2007
245	0	0	\|a Dielectric films for advanced microelectronics \|c edited by Mikhail Baklanov, Martin Green, and Karen Maex
260	0	0	\|a Chichester, England; \|a Hoboken, NJ \|b John Wiley & Sons \|c 2007
300	0	0	\|a xxii, 486 p. \|b ill. \|c 26 cm
490	0	0	\|a Wiley series in materials for electronic and optoelectronic applications
504	0	0	\|a Includes bibliographical references and index
650	#	0	\|a Dielectric films \|x Materials
650	#	0	\|a Microelectronics \|x Materials
700	1	0	\|a Baklanov, Mikhail
700	1	0	\|a Green, Martin
700	1	0	\|a Maex, Karen
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=366854
964	#	#	\|c BOK \|d 01