Dielectric films for advanced microelectronics

Dielectric films for advanced microelectronics

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Bibliographic Details
Other Authors: Baklanov, Mikhail, Green, Martin, Maex, Karen
Format: Book
Published: Chichester, England; Hoboken, NJ John Wiley & Sons 2007
Series:Wiley series in materials for electronic and optoelectronic applications
Subjects:
Dielectric films > Materials
Microelectronics > Materials
Online Access:Click Here to View Status and Holdings.
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Description
Physical Description:xxii, 486 p. ill. 26 cm
Bibliography:Includes bibliographical references and index
ISBN:9780470013601 (hbk.)
0470013605 (hbk.)

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