MEMS design and fabrication

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Bibliographic Details
Other Authors:	Gad-el-Hak, Mohamed 1945-
Format:	Book
Published:	Boca Raton, FL CRC/Taylor & Francis 2006
Edition:	2nd ed
Series:	Mechanical engineering series
Subjects:	Microfabrication Microelectromechanical systems > Design and construction
Online Access:	Click Here to View Status and Holdings.
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MARC


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245	1	1	\|a MEMS \|b design and fabrication \|c edited by Mohamed Gad-el-Hak
246	1	#	\|a MEMS handbook
250	#	#	\|a 2nd ed
260	#	#	\|a Boca Raton, FL \|b CRC/Taylor & Francis \|c 2006
300	#	#	\|a 1 v.(various pagings) \|b ill. \|c 26 cm
490	1	#	\|a Mechanical engineering series
504	#	#	\|a Includes bibliographical references and index
650	#	0	\|a Microfabrication
650	#	0	\|a Microelectromechanical systems \|x Design and construction
700	1	#	\|a Gad-el-Hak, Mohamed \|d 1945-
840	#	#	\|a Mechanical engineering series (Boca Raton, Fla.)
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=345651
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