MEMS design and fabrication

Saved in:

Bibliographic Details
Other Authors:	Gad-el-Hak, Mohamed 1945-
Format:	Unknown
Published:	Boca Raton, FL CRC/Taylor & Francis 2006
Edition:	2nd ed
Series:	Mechanical engineering series
Subjects:	Microfabrication Microelectromechanical systems > Design and construction
Online Access:	Click Here to View Status and Holdings.
Tags:	Add Tag No Tags, Be the first to tag this record!

MARC


LEADER	00000n a2200000 a 4501
001	wils-345651
020	#	#	\|a 0849391385
040	#	#	\|a DLC \|d ITMB
090	0	0	\|a TK7875 \|b .M444 2005
245	1	1	\|a MEMS \|b design and fabrication \|c edited by Mohamed Gad-el-Hak
246	1	#	\|a MEMS handbook
250	#	#	\|a 2nd ed
260	#	#	\|a Boca Raton, FL \|b CRC/Taylor & Francis \|c 2006
300	#	#	\|a 1 v.(various pagings) \|b ill. \|c 26 cm
490	1	#	\|a Mechanical engineering series
504	#	#	\|a Includes bibliographical references and index
650	#	0	\|a Microfabrication
650	#	0	\|a Microelectromechanical systems \|x Design and construction
700	1	#	\|a Gad-el-Hak, Mohamed \|d 1945-
840	#	#	\|a Mechanical engineering series (Boca Raton, Fla.)
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=345651
964	#	#	\|c BOK \|d 01
998	#	#	\|a 00250##a003.5.1\|\|00260##a003.5.1\|\|00260##b003.5.1\|\|00260##c003.5.1\|\|00300##a003.5.1\|\|00300##b003.5.1\|\|00300##c003.5.1\|\|