MEMS design and fabrication

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Bibliographic Details
Other Authors:	Gad-el-Hak, Mohamed 1945-
Format:	Unknown
Published:	Boca Raton, FL CRC/Taylor & Francis 2006
Edition:	2nd ed
Series:	Mechanical engineering series
Subjects:	Microfabrication Microelectromechanical systems > Design and construction
Online Access:	Click Here to View Status and Holdings.
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