MEMS design and fabrication
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| Other Authors: | |
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| Format: | Book |
| Published: |
Boca Raton, FL
CRC/Taylor & Francis
2006
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| Edition: | 2nd ed |
| Series: | Mechanical engineering series
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| Subjects: | |
| Online Access: | Click Here to View Status and Holdings. |
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Add Tag | Physical Description: | 1 v.(various pagings) ill. 26 cm |
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| Bibliography: | Includes bibliographical references and index |
| ISBN: | 0849391385 |
Introduction to microfabrication