MEMS and NEMS systems, devices, and structures

Saved in:

Bibliographic Details
Main Author:	Lyshevski, Sergey Edward
Format:	Unknown
Published:	Boca Raton, Fla. CRC Press 2002
Series:	Nano- and microscience, engineering, technology, and medicine series
Subjects:	Microelectromechanical systems
Online Access:	Click Here to View Status and Holdings.
Tags:	Add Tag No Tags, Be the first to tag this record!

MARC


LEADER	00000n a2200000 a 4501
001	wils-340588
020	#	#	\|a 0849312620 (alk. paper)
090	0	0	\|a TK7875 \|b .L9597 2002
100	1	#	\|a Lyshevski, Sergey Edward
245	1	1	\|a MEMS and NEMS \|b systems, devices, and structures \|c Sergey Edward Lyshevski
260	#	#	\|a Boca Raton, Fla. \|b CRC Press \|c 2002
300	#	#	\|a 461 p. \|b ill. \|c 25 cm
490	1	#	\|a Nano- and microscience, engineering, technology, and medicine series
504	#	#	\|a Includes bibliographical references and index
650	#	0	\|a Microelectromechanical systems
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=340588
964	#	#	\|c BOK \|d 01
040	#	#	\|a Shah Alam
998	#	#	\|a 00260##a003.5.1\|\|00260##b003.5.1\|\|00260##c003.5.1\|\|00300##a003.5.1\|\|00300##b003.5.1\|\|00300##c003.5.1\|\|