MEMS and NEMS systems, devices, and structures

Saved in:

Bibliographic Details
Main Author:	Lyshevski, Sergey Edward
Format:	Unknown
Published:	Boca Raton, Fla. CRC Press 2002
Series:	Nano- and microscience, engineering, technology, and medicine series
Subjects:	Microelectromechanical systems
Online Access:	Click Here to View Status and Holdings.
Tags:	Add Tag No Tags, Be the first to tag this record!

Internet