MEMS and NEMS systems, devices, and structures

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Bibliographic Details
Main Author:	Lyshevski, Sergey Edward
Format:	Book
Published:	Boca Raton, Fla. CRC Press 2002
Series:	Nano- and microscience, engineering, technology, and medicine series
Subjects:	Microelectromechanical systems
Online Access:	Click Here to View Status and Holdings.
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