Introduction to microelectronic fabrication

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Bibliographic Details
Main Author:	Jaeger, Richard C
Format:	Unknown
Published:	Upper Saddle River, N.J. Prentice Hall 2002
Edition:	2nd ed
Series:	Modular series on solid state devices v. 5
Subjects:	Integrated circuits > Textbooks > Design and construction > Very large scale integration
Online Access:	Click Here to View Status and Holdings.
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090	0	0	\|a TK7874 \|b .J33 2002
100	1	#	\|a Jaeger, Richard C
245	1	1	\|a Introduction to microelectronic fabrication \|c Richard C. Jaeger
250	#	#	\|a 2nd ed
260	#	#	\|a Upper Saddle River, N.J. \|b Prentice Hall \|c 2002
300	#	#	\|a xiv, 316 p. \|b ill. \|c 24 cm
490	1	#	\|a Modular series on solid state devices \|v v. 5
504	#	#	\|a Includes bibliographical references and index
650	#	0	\|a Integrated circuits \|v Textbooks \|x Design and construction \|x Very large scale integration
840	#	#	\|a Modular series on solid state devices (Upper Saddle River, N.J.) ; \|v v. 5
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=338069
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