Introduction to microelectronic fabrication

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Bibliographic Details
Main Author:	Jaeger, Richard C
Format:	Book
Published:	Upper Saddle River, N.J. Prentice Hall 2002
Edition:	2nd ed
Series:	Modular series on solid state devices v. 5
Subjects:	Integrated circuits > Textbooks > Design and construction > Very large scale integration
Online Access:	Click Here to View Status and Holdings.
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