Introduction to microelectronic fabrication

Introduction to microelectronic fabrication

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Bibliographic Details
Main Author: Jaeger, Richard C
Format: Book
Published: Upper Saddle River, N.J. Prentice Hall 2002
Edition:2nd ed
Series:Modular series on solid state devices v. 5
Subjects:
Integrated circuits > Textbooks > Design and construction > Very large scale integration
Online Access:Click Here to View Status and Holdings.
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Description
Physical Description:xiv, 316 p. ill. 24 cm
Bibliography:Includes bibliographical references and index
ISBN:0201444941

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