Introduction to microelectronic fabrication
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Main Author: | |
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Format: | Unknown |
Published: |
Upper Saddle River, N.J.
Prentice Hall
2002
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Edition: | 2nd ed |
Series: | Modular series on solid state devices
v. 5 |
Subjects: | |
Online Access: | Click Here to View Status and Holdings. |
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Physical Description: | xiv, 316 p. ill. 24 cm |
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Bibliography: | Includes bibliographical references and index |
ISBN: | 0201444941 |