MEMS introduction and fundamentals
Saved in:
| Other Authors: | |
|---|---|
| Format: | Book |
| Published: |
Boca Raton, FL
Taylor&Francis
2006
|
| Edition: | 2nd ed |
| Series: | Mechanical engineering series (Boca Raton, Fla.)
|
| Subjects: | |
| Online Access: | Click Here to View Status and Holdings. |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Add Tag Be the first to leave a comment!
Foundations of MEMS