MEMS introduction and fundamentals

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Bibliographic Details
Other Authors:	Gad-el-Hak, Mohamed 1945-
Format:	Unknown
Published:	Boca Raton, FL Taylor&Francis 2006
Edition:	2nd ed
Series:	Mechanical engineering series (Boca Raton, Fla.)
Subjects:	Microelectromechanical systems > Handbooks, manuals, etc
Online Access:	Click Here to View Status and Holdings.
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