Modelling of microfabrication systems

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Bibliographic Details
Main Author:	Nassar, Raja
Other Authors:	Dai, Weizhong
Format:	Unknown
Published:	Berlin New York Springer 2003
Series:	Microtechnology and MEMS,
Subjects:	Integrated circuits > Mathematical models Microelectromechanical systems > Mathematical models Microelectronics > Mathematical models
Online Access:	Click Here to View Status and Holdings.
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020	#	#	\|a 3540002529 (alk. paper)
090	0	0	\|a TK7836 \|b .N35 2003
100	1	#	\|a Nassar, Raja
245	1	1	\|a Modelling of microfabrication systems \|c Raja Nassar, Weizhong Dai
260	#	#	\|a Berlin \|a New York \|b Springer \|c 2003
300	#	#	\|a x, 269 p. \|b ill. \|c 24 cm
490	1	#	\|a Microtechnology and MEMS, \|x 1615-8326
504	#	#	\|a Includes bibliographical references (p. [249]-261) and index
650	#	0	\|a Integrated circuits \|x Mathematical models
650	#	0	\|a Microelectromechanical systems \|x Mathematical models
650	#	0	\|a Microelectronics \|x Mathematical models
700	1	#	\|a Dai, Weizhong
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=316144
964	#	#	\|c BOK \|d 01
040	#	#	\|a Shah Alam
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