Modelling of microfabrication systems

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Bibliographic Details
Main Author:	Nassar, Raja
Other Authors:	Dai, Weizhong
Format:	Unknown
Published:	Berlin New York Springer 2003
Series:	Microtechnology and MEMS,
Subjects:	Integrated circuits > Mathematical models Microelectromechanical systems > Mathematical models Microelectronics > Mathematical models
Online Access:	Click Here to View Status and Holdings.
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