Modelling of microfabrication systems

Modelling of microfabrication systems

Saved in:
Bibliographic Details
Main Author: Nassar, Raja
Other Authors: Dai, Weizhong
Format: Unknown
Published: Berlin New York Springer 2003
Series:Microtechnology and MEMS,
Subjects:
Integrated circuits > Mathematical models
Microelectromechanical systems > Mathematical models
Microelectronics > Mathematical models
Online Access:Click Here to View Status and Holdings.
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Physical Description:x, 269 p. ill. 24 cm
Bibliography:Includes bibliographical references (p. [249]-261) and index
ISBN:3540002529 (alk. paper)
ISSN:1615-8326

Similar Items