Mechanical microsensors

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Bibliographic Details
Main Author:	Elwenspoek, M 1948- (Miko)
Other Authors:	Wiegerink, Remco J. 1964-
Format:	Book
Published:	Berlin New York Springer 2001
Series:	Microtechnology and MEMS
Subjects:	Transducers Silicon > Design and construction Detectors > Design and construction Microelectromechanical systems > Design and construction Micromachining
Online Access:	Click Here to View Status and Holdings.
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MARC


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001	wils-316135
020	#	#	\|a 3540675825 (alk. paper)
090	0	0	\|a TK7875 \|b .E49 2001
100	1	#	\|a Elwenspoek, M \|c 1948- \|q (Miko)
245	1	0	\|a Mechanical microsensors \|c M. Elwenspoek, R.J. Wiergerink
260	#	#	\|a Berlin \|a New York \|b Springer \|c 2001
300	#	#	\|a x, 295 p. \|b ill. \|c 25 cm
490	1	#	\|a Microtechnology and MEMS
504	#	#	\|a Includes bibliographical references and index
650	#	0	\|a Transducers
650	#	0	\|a Silicon \|x Design and construction
650	#	0	\|a Detectors \|x Design and construction
650	#	0	\|a Microelectromechanical systems \|x Design and construction
650	#	0	\|a Micromachining
700	1	#	\|a Wiegerink, Remco J. \|c 1964-
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=316135
964	#	#	\|c BOK \|d 01
040	#	#	\|a Shah Alam