Mechanical microsensors

Saved in:

Bibliographic Details
Main Author:	Elwenspoek, M 1948- (Miko)
Other Authors:	Wiegerink, Remco J. 1964-
Format:	Book
Published:	Berlin New York Springer 2001
Series:	Microtechnology and MEMS
Subjects:	Transducers Silicon > Design and construction Detectors > Design and construction Microelectromechanical systems > Design and construction Micromachining
Online Access:	Click Here to View Status and Holdings.
Tags:	Add Tag No Tags, Be the first to tag this record!

Internet