Silicon nitride for microelectronic applications
Saved in:
| Main Author: | |
|---|---|
| Format: | Book |
| Published: |
New York
IFI/Plenum
1971-72
|
| Series: | Handbook of electronic materials, v. 3, 6
|
| Subjects: | |
| Online Access: | Click Here to View Status and Holdings. |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Add Tag 
Porous silicon carbide and gallium nitride epitaxy, catalysis, and biotechnology applications
Microelectronics theory, design, and fabrication.
