Silicon nitride for microelectronic applications

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Bibliographic Details
Main Author:	Milek, John T. (John Theophild1915-
Format:	Book
Published:	New York IFI/Plenum 1971-72
Series:	Handbook of electronic materials, v. 3, 6
Subjects:	Microelectronics > Materials Silicon nitride
Online Access:	Click Here to View Status and Holdings.
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