Silicon nitride for microelectronic applications

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Bibliographic Details
Main Author:	Milek, John T. (John Theophild1915-
Format:	Book
Published:	New York IFI/Plenum 1971-72
Series:	Handbook of electronic materials, v. 3, 6
Subjects:	Microelectronics > Materials Silicon nitride
Online Access:	Click Here to View Status and Holdings.
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090	0	0	\|a TK7871.15.S558 \|b M55 1971
100	1	#	\|a Milek, John T. \|q (John Theophild1915-
245	1	1	\|a Silicon nitride for microelectronic applications \|c [by] John T. Milek
260	#	#	\|a New York \|b IFI/Plenum \|c 1971-72
300	#	#	\|a 2 v 118p. . \|b illus. \|c 28 cm
490	1	#	\|a Handbook of electronic materials, v. 3, 6
504	#	#	\|a Includes bibliographies.
505	1	#	\|a pt. 1. Preparation and properties.--pt. 2. Applications and devices.
650	#	0	\|a Microelectronics \|x Materials
650	#	0	\|a Silicon nitride
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=28103
964	#	#	\|c BOK \|d 01
040	#	#	\|a Shah Alam
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