Silicon nitride for microelectronic applications
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| Main Author: | |
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| Format: | Book |
| Published: |
New York
IFI/Plenum
1971-72
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| Series: | Handbook of electronic materials, v. 3, 6
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| Subjects: | |
| Online Access: | Click Here to View Status and Holdings. |
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Add Tag | Physical Description: | 2 v 118p. . illus. 28 cm |
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| Bibliography: | Includes bibliographies. |
| ISBN: | 0306671034 |
Porous silicon carbide and gallium nitride epitaxy, catalysis, and biotechnology applications